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IN THIS PAPER DYNAMICAL INSTABILITY OF THREE PLATES MICRO SWITCH UNDER DC VOLTAGE ACTUATION HAVE BEEN STUDIED. RECENTLY SOME WORKS HAVE BEEN DONE IN THE CASE OF STUDY OF STATIC AND DYNAMIC BEHAVIOR OF SUCH SWITCHES USING CLASSIC BEAM THEORY AND WITHOUT CONSIDERING OF LENGTH SCALE PARAMETER. IN THIS PAPER DYNAMIC BEHAVIOR OF THE SWITCH HAS BEEN INVESTIGATED BASED ON COUPLE STRESS THEORY AND TAKING INTO ACCOUNT OF LENGTH SCALE PARAMETER. FOR THIS REASON, GOVERNING DYNAMIC EQUATION OF THE MICRO SWITCH HAS BEEN EXTRACTED AND PRESENTED. BECAUSE OF NONLINEARITY OF GOVERNING EQUATION DUE TO EXISTENCE OF ELECTROSTATIC FORCE, GALERKIN METHOD HAS BEEN IMPLEMENTED FOR OVERCOMING OF THIS NONLINEARITY AND SOLVE OF MENTIONED EQUATION AND OBTAIN OF DYNAMIC RESPONSE. DYNAMIC RESPONSE OF MICRO SWITCH HAS BEEN INVESTIGATED WITH AND WITHOUT CONSIDERING OF DAMPING EFFECTS. VARIATION OF DYNAMIC PULL-IN VOLTAGE VERSUS MICRO BEAM LENGTH AND PRIMARY GAP BETWEEN MICRO BEAM AND STATIONARY ELECTRODES HAVE BEEN STUDIED USING COUPLE STRESS AND CLASSIC BEAM THEORY AND OBTAINED RESULTS HAVE BEEN COMPARED TO EACH OTHER. ALSO DEPENDENCY OF DYNAMIC PULL-IN VOLTAGE TO DAMPING FACTOR HAS BEEN STUDIED WITH CONSIDERING TWO THEORIES. FURTHERMORE SWITCHING TIME OF MICRO SWITCH HAVE BEEN DETERMINED USING TWO MENTIONED THEORIES AND REQUIRED COMPARISON ABOUT RESULTS OF TWO THEORIES HAS BEEN COMPLETED.
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